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Solar

HJT High Efficiency Solar Cell Manufacturing
Whole-line Solution

The Whole-line Solution for HJT High Efficiency Cell Manufacturing, which completely covers the four processes of HJT cell production( as shown in the figure below), is independently developed by Maxwell. Through the manufacturing process for larger, thinner and half-sized wafers, the Whole-line Solution combines innovative process route, integrated MES intelligent system to further improve the conversion efficiency, yield and production capacity of solar cells, while reducing the production cost.

Process Flow

Texturing

1

Silicon-Based Film Deposition
(PECVD)

2

Transparent Conductive Film Deposition
(PVD)

3

Screen Printing

4

Advantages of the Whole-line Solution

Texturing

Equipped with two kinds of pre-clean process:Precln#1(O₃)→  SDE →  Precln#2(H₂O₂)

PECVD Equipment

Fully automatic processes for double-sided coating, continuous coating and RPS self-cleaning, with high production capacity and no need of overhead crane

PVD Equipment

Continuous complete the TCO coating of frontside and backside coating; High production capacity, with 8 process units (PU) improving TCO coating process flexibility, no need of overhead crane, and coating utilization rate up to 80%

Screen Printing
Equipment

Flat curing and integrated LED light soaking

Automation

Minimum wafer contact, environmental control, integrated on-line detection

Strong MES Central
Control System

Continuous complete the TCO coating of frontside and backside coating; High production capacity, with 8 process units (PU) improving TCO coating process flexibility, no need of overhead crane, and coating utilization rate up to 80%

Process 1 Texturing

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Process 2 PECVD

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  • HJT Texturing Equipment__HJ-TEX-182/210

  • PECVD Coating Equipment__Maxwell MV-LH06

Process 3 PVD

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Process 4 Screen Printing

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  • HJT PVD Equipment__Maxwell P6

  • The Complete Line of Screen Printing Equipment for HJT Cell MW-XDL-DP(HJT)

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